Abstract:
Design and simulation of micro energy harvester using mems (microelectromechanical systems) technology are presented. It is used to produce energy from ambient vibration to drive a low power microsensor. The design of a multilayered (ti/pzt/ti/sio2 /si) microcantilever is carried out using the piezomumps (the multi-user mems process for piezoelectric devices) process. A standard microcantilever with a proof mass is used in the study. The natural frequency of the microcantilever is tuned for a low frequency (~126 hz) at which gives a higher response. The tuned resonance frequency of the microcantilever needs to match with a source frequency to get enhanced energy efficiency. Hence, the design simulation of micro energy harvester is presented under applied 1 g magnitude acceleration. The maximum power transfer of the current design is observed 2.5 μw for the 100 kω resistive load. © the author(s), under exclusive license to springer nature singapore pte ltd. 2022.