SIKDER, AK; JACOB, AP; SHARDA, T; MISRA, DS; PANDEY, M; KABIRAJ, D; AVASTHI, DK
(ELSEVIER SCIENCE SA, 1998)
Diamond sheets were grown on p-type Si(100) substrates varying the deposition pressure from 20 to 140 Torr at 1163 K by a hot filament chemical vapour deposition (HFCVD) process. A mixture of 0.8% methane in balance hydrogen ...