Microcantilever based biosensors

Abstract

By combining silicon micromechanical techniques with surface functionalization, it is possible to realize MEMS (Micro-Electro-Mechanical system) systems for biological analysis. In this review, we summarize the working principle of a few selected MEMS bio-sensing devices. We also discuss the fabrication and operational aspects of such sensors and in particular immunosensors which employ the unique principle-of anti body-antigen interaction. A complete overview of biological sensing using microcantilevers is presented.