E-beam deposited SnO2Pt-SnO2 and Pd-SnO2 thin films for LPG detection

Abstract

The electron-beam evaporation method was used to deposit undoped and Pt (or Pd) doped SnO2 thin films. After careful study of their physical properties, SnO2 thin films with suitable growth conditions were selected for probing their response to LPG and other common household gases. The response behaviour is explained with the help of theoretical models. Based on these results, the optimum parameters for film growth and sensor operation were identified for LP gas detection. (C) 1999 Elsevier Science S.A. .