EPITAXIAL-GROWTH OF SILICON IN THE MIXED FLOW MODE

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EPITAXIAL-GROWTH OF SILICON IN THE MIXED FLOW MODE

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Title: EPITAXIAL-GROWTH OF SILICON IN THE MIXED FLOW MODE
Author: SUNDARSINGH, VP; FELIX, VP; PRASAD, PM
URI: http://dx.doi.org/10.1080/00207218008901209
http://dspace.library.iitb.ac.in/xmlui/handle/10054/12503
http://hdl.handle.net/10054/12503
Date: 1980


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