Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si

DSpace/Manakin Repository

Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si

Show full item record

Title: Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si
Author: PRASHANTHI, K; MANDAL, M; DUTTAGUPTA, SP; PINTO, R; PALKAR, VR
Abstract: In this paper, the fabrication and characterization of a novel magnetoelectric multiferroic (Dy modified BiFeO(3) or BDFO) MEMS cantilevers fabricated directly on Si have been reported for the first time ever. The functioning of BDFO microcantilevers has been tested in the presence of electric field as well as magnetic field. The transverse piezoelectric coefficients d(31) and e(31) of the BDFO films measured from the deflection of the cantilever under applied voltage were -40 pm/V and -5.63 C/m(2) respectively. The piezoelectric properties of BDFO films are similar to that reported for lead zirconate titanate (PZT), while offering additional flexibility in designing and operating MEMS devices. (C) 2010 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.sna.2010.12.013
http://dspace.library.iitb.ac.in/jspui/handle/100/14186
Date: 2011


Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)

Show full item record

Search DSpace


Advanced Search

Browse

My Account