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Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/10054/8546

Title: Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers
Authors: KALE, NS
JOSHI, M
RAO, PN
MUKHERJI, S
RAO, VR
Issue Date: 2009
Publisher: INDIAN ACAD SCIENCES
Citation: SADHANA-ACADEMY PROCEEDINGS IN ENGINEERING SCIENCES, 34(4), 591-597
Abstract: Methods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail.
URI: http://dx.doi.org/10.1007/s12046-009-0036-7
http://dspace.library.iitb.ac.in/xmlui/handle/10054/8546
http://hdl.handle.net/10054/8546
ISSN: 0256-2499
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