DSpace
 

DSpace at IIT Bombay >
IITB Publications >
Article >

Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/10054/8161

Title: A Common Framework of NBTI Generation and Recovery in Plasma-Nitrided SiON p-MOSFETs
Authors: DEORA, S
MAHETA, VD
ISLAM, AE
ALAM, MA
MAHAPATRA, S
Keywords: bias temperature instability
i-dlin technique
interface-trap
nitrogen
stress
Issue Date: 2009
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation: IEEE ELECTRON DEVICE LETTERS, 30(9), 978-980
Abstract: Generation and recovery of degradation during and after negative bias temperature instability (NBTI) stress are studied in a wide variety of plasma-nitrided (PN) silicon oxynitride (SiON) p-MOSFETs. An ultrafast on-the-fly linear drain current (I(DLIN)) technique, which is capable of measuring the shift in threshold voltage from very short (approximately in microseconds) to long (approximately in hours) stress/recovery time, is used. The mechanics of NBTI generation and recovery are shown to be strongly correlated and can be consistently explained using the framework of an uncorrelated sum of a fast and weakly temperature (T)-dependent trapped-hole (Delta V(h)) component and a relatively slow and strongly T-activated interface trap (Delta V(IT)) component. The SiON process dependences are attributed to the difference in the relative contributions of Delta V(h) and Delta V(IT) to the overall degradation (Delta V(T)), as dictated by the nitrogen (N) content and thickness of the gate insulator.
URI: http://dx.doi.org/10.1109/LED.2009.2026436
http://dspace.library.iitb.ac.in/xmlui/handle/10054/8161
http://hdl.handle.net/10054/8161
ISSN: 0741-3106
Appears in Collections:Article

Files in This Item:

File SizeFormat
A Common Framework of NBTI Generation .pdf251.11 kBAdobe PDFView/Open
View Statistics

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

 

Valid XHTML 1.0! DSpace Software Copyright © 2002-2010  Duraspace - Feedback