DSpace
 

DSpace at IIT Bombay >
IITB Publications >
Article >

Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/10054/6889

Title: Polymer microcantilever biochemical sensors with integrated polymer composites for electrical detection
Authors: SEENA, V
RAJORYA, A
PANT, P
MUKHERJI, S
RAO, VR
Keywords: su-8
immobilization
Issue Date: 2009
Publisher: ELSEVIER SCIENCE BV
Citation: SOLID STATE SCIENCES, 11(9), 1606-1611
Abstract: Micro fabricated sensors based on nanomechanical motion with piezoresistive electrical readout have become a promising biochemical sensing tool. The conventional microcantilever materials are mostly silicon-based. The sensitivity of the sensor depends on Young's modulus of the structural material, thickness of the cantilever as well as on the gauge factor of the piezoresistor. UV patternable polymers such as SU-8 have a very low Young's modulus compared to the silicon-based materials. Polymer cantilevers with a piezoresistive material having a large gauge factor and a lower Young's modulus are therefore highly suited for sensing applications. In this work, a spin coatable and photopatternable mixture of carbon black (CB) and SU-8, with proper dispersion characteristics, has been demonstrated as a piezoresistive thin film for polymer microcantilevers. Results on percolation experiments of SU-8/CB composite and fabrication of piezoresistive SU-8 microcantilevers using this composite are presented. With our controlled dispersion experiments, we could get a uniform piezoresistive thin film of thickness less than 1.2 mu m and resistivity of 2.7 Omega cm using 10 wt% of CB in SU-8. The overall thickness of the SU-8/composite/SU-8 is approximately 3 pm. We further present results on the electromechanical characterization and biofunctionalization of the cantilever structures for biochemical sensing applications. These cantilevers show a deflection sensitivity of 0.55 ppm/nm. Since the surface stress sensitivity is 4.1 x 10(-3) [N/m](-1), these cantilevers can well be used for detection of protein markers for pathological applications. (C) 2009 Elsevier Masson SAS. .
URI: http://dx.doi.org/10.1016/j.solidstatesciences.2009.06.009
http://dspace.library.iitb.ac.in/xmlui/handle/10054/6889
http://hdl.handle.net/10054/6889
ISSN: 1293-2558
Appears in Collections:Article

Files in This Item:

There are no files associated with this item.

View Statistics

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

 

Valid XHTML 1.0! DSpace Software Copyright © 2002-2010  Duraspace - Feedback