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|Title: ||Anomalous Auger electron spectroscopy results of chemical vapor deposited diamond (111) and (100) surfaces|
|Authors: ||SHARDA, T|
|Keywords: ||film deposition|
|Issue Date: ||1997|
|Publisher: ||ELSEVIER SCIENCE BV|
|Citation: ||APPLIED SURFACE SCIENCE, 115(1), 23-27|
|Abstract: ||High resolution Auger electron spectroscopy was performed on (111) and (100) facets as well as on a microvoid of polycrystalline diamond films. Auger fine structure analyses of these facets indicate anomalous line shapes when electron beam was focused to about 0.2 mu m diameter in contrast to the large area scans (beam size similar to 10 x 8 mu m) which exhibit a typical Auger pattern characteristic of diamond. This unusual behavior is discussed in terms of surface reconstruction which may occur due to Auger assisted desorption of hydrogen.|
|Appears in Collections:||Article|
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