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| Title: | Photoplastic NEMS with an encapsulated polysilicon piezoresistor |
| Authors: | KALE, NS
NAG, S
PINTO, RICHARD
RAMGOPAL RAO, V |
| Keywords: | cantilevers
nanotechnology
piezoresistive devices
resistors |
| Issue Date: | 2008 |
| Publisher: | IEEE |
| Citation: | Proceedings of the 8th IEEE Conference on Nanotechnology, Arlington, USA, 18-21 August 2008, 460-463 |
| Abstract: | We demonstrate a photoplastic NEMS device that has an encapsulated polysilicon piezoresistor. The crucial temperature limitation of depositing a polysilicon film on a polymer was overcome by employing a novel Hotwire CVD process. In this paper, we report the fabrication and characterization of a novel polymeric cantilever with an embedded piezoresistor, which exploits the low Youngs modulus of a polymer and high gauge factor of polysilicon. Such devices are widely used for sensing biochemicals. |
| URI: | 10.1109/NANO.2008.140
http://hdl.handle.net/10054/586
http://dspace.library.iitb.ac.in/xmlui/handle/10054/586 |
| ISBN: | 978-1-4244-2103-9 |
| Appears in Collections: | Proceedings papers
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