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Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/10054/4348

Title: Growth and dielectric behavior of radio frequency magnetron-sputtered lead magnesium niobate thin films
Authors: JAYDEEP, S
YADAV, S
MALLA, BP
KULKARNI, AR
VENKATRAMANI, N
Keywords: deposition
Issue Date: 2002
Publisher: AMER INST PHYSICS
Citation: APPLIED PHYSICS LETTERS, 81(20), 3840-3842
Abstract: Lead magnesium niobate (PMN) thin films have been grown on quartz/Cr/Au substrates from a single target source by rf magnetron sputtering at room temperature. Sputtering parameters and the post-annealing temperature have been optimized to obtain phase pure PMN films. Grain sizes, obtained from atomic force microscopy and x-ray line broadening, show nanosized grains of nearly 45 nm. Dielectric response of photolithographically patterned quartz/Cr/Au/PMN/Au structures have been studied. The effect of film thickness and frequency on the dielectric constant has been examined at room temperature. The dielectric constant and remanent polarization show linear thickness dependence. (C) 2002
URI: http://dx.doi.org/10.1063/1.1517175
http://dspace.library.iitb.ac.in/xmlui/handle/10054/4348
http://hdl.handle.net/10054/4348
ISSN: 0003-6951
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