DSpace
 

DSpace at IIT Bombay >
IITB Publications >
Article >

Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/10054/1415

Title: Is the nucleation and coalescence behavior in the growth of a-Si:H films prepared by the CAT-CVD different?
Authors: DUSANE, RO
BAUER, S
SCHROEDER, B
OECHSNER, H
Keywords: hydrogen
nucleation
thermochemistry
surface chemistry
Issue Date: 2001
Publisher: Elsevier
Citation: Thin Solid Films 395(1-2), 121-124
Abstract: This paper reports the results of detailed experiments carried out to understand the growth of a-Si:H films deposited by thermocatalytic chemical vapor deposition (TCCVD) at different substrate temperatures (Ts). Kinetic ellipsometry data reveal that the growth kinetics drastically changes as Ts is increased from 110 to 450°C. Although nucleation occurs at all Ts, a major difference is observed in the coalescence behavior. At the lowest Ts, no trace of coalescence is reflected in the data. In the intermediate Ts region, incomplete or partial coalescence introduces the lobe/cusp pattern in the (left angle bracketvar epsilon1right-pointing angle bracket,left angle bracketvar epsilon2right-pointing angle bracket) curve, while above 350°C, complete coalescence leads to the presence of a loop in the (left angle bracketvar epsilon1right-pointing angle bracket,left angle bracketvar epsilon2right-pointing angle bracket) data. We attribute this change in the (left angle bracketvar epsilon1right-pointing angle bracket,left angle bracketvar epsilon2right-pointing angle bracket) trajectory to a systematic variation in the surface reactivity and hydrogen coverage with increasing Ts.
URI: 10.1016/S0040-6090(01)01228-7
http://hdl.handle.net/10054/1415
http://dspace.library.iitb.ac.in/xmlui/handle/10054/1415
ISSN: 0040-6090
Appears in Collections:Article

Files in This Item:

File Description SizeFormat
5548-9.pdf79.69 kBAdobe PDFView/Open
View Statistics

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

 

Valid XHTML 1.0! DSpace Software Copyright © 2002-2010  Duraspace - Feedback