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| Title: | Selective electroless plating-a new technique for GaAs MMICs |
| Authors: | MAHAPATRA, S
CHOUDHURY, D
BHATGADDE, LG |
| Keywords: | iii-v semiconductors
mmic
electroless deposition
gallium arsenide
integrated circuit manufacture
metallisation
strip lines
waveguides |
| Issue Date: | 1991 |
| Publisher: | IEEE |
| Citation: | IEEE Transactions on Semiconductor Manufacturing 4(1), 69-72 |
| Abstract: | A simple, cost-effective processing technique, selective electroless plating, is proposed for GaAs monolithic microwave integrated circuits (MMICs). Microwave measurements show that the attenuation properties of transmission lines fabricated by this processing technique are comparable to the attenuation properties of lines fabricated by the traditional evaporation lift-off technique. |
| URI: | http://dx.doi.org/10.1109/66.75856
http://hdl.handle.net/10054/129
http://dspace.library.iitb.ac.in/xmlui/handle/10054/129 |
| ISSN: | 0894-6507 |
| Appears in Collections: | Article
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