POWER LAW MODEL FOR POSITIVE CHARGE BUILDUP IN SILICON DIOXIDE DUE TO HIGH-FIELD STRESSING

Abstract

Positive charge growth in the oxide of a MOS capacitor due to tunnel injection during high-field stressing is found to obey a power law with respect to time. This law is valid for both constant voltage and constant current stress, though the constants of the power law are different. Monotonic increase in positive charge build-up is observed until breakdown. Thus positive charge build-up is a signature of wearout and can be used to monitor the oxide degradation.