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Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/10054/1001

Title: Effect of substrate temperature on the structure and optical properties of ZnO thin films deposited by reactive rf magnetron sputtering
Authors: SINGH, SUKHVINDER
SRINIVASA, RS
MAJOR, SS
Keywords: raman spectroscopy
magnetron sputtering
optical properties
oxide films
Issue Date: 2007
Publisher: Elsevier
Citation: Thin Solid Films 515(24), 8718-8722
Abstract: Zinc Oxide films were deposited on quartz substrates by reactive rf magnetron sputtering of zinc target. The effect of substrate temperature on the crystallinity and band edge luminescence has been studied. The films deposited at 300 °C exhibited the strongest c-axis orientation. AFM and Raman studies indicated that the films deposited at 600 °C possess better overall crystallinity with reduction of optically active defects, leading to strong and narrow PL emission.
URI: http://dx.doi.org/10.1016/j.tsf.2007.03.168
http://hdl.handle.net/10054/1001
http://dspace.library.iitb.ac.in/xmlui/handle/10054/1001
ISSN: 0040-6090
Appears in Collections:Article

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