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Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/100/879

Title: An interface reaction-mechanism for the dry oxidation of silicon
Authors: MOHARIR, SS
CHANDORKAR, AN
VASI, J
Issue Date: 1989
Publisher: AMER INST PHYSICS
Citation: JOURNAL OF APPLIED PHYSICS,65(5)2171-2173
URI: http://dx.doi.org/10.1063/1.342850
http://dspace.library.iitb.ac.in/xmlui/handle/10054/13406
http://hdl.handle.net/100/879
ISSN: 0021-8979
Appears in Collections:Note

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