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| Title: | Au nanocrystal flash memory reliability and failure analysis |
| Authors: | SINGH, PK
SINGH, KK
HOFMANN, R
ARMSTRONG, K
KRISHNA, N
MAHAPATRA, S |
| Keywords: | fabrication
performance
oxide |
| Issue Date: | 2008 |
| Publisher: | IEEE |
| Citation: | IPFA 2008: PROCEEDINGS OF THE 15TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS,214-218 |
| Abstract: | In this work we investigate the memory performance and reliability of An nanocrystal memory devices. We analyze the Au NC formation process and fabricate actual test wafers for electrical characterization. With reference to good Pt NC devices, poor performance of Au NC devices is investigated in detail by analytical and electrical methods. |
| URI: | http://dspace.library.iitb.ac.in/xmlui/handle/10054/15883
http://hdl.handle.net/100/2058 |
| ISBN: | 978-1-4244-2039-1 |
| Appears in Collections: | Proceedings papers
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