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Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/100/2003

Title: Improvement in reliability of MEMS resonator using multi-layers
Authors: APTE, PR
PATANKAR, PU
BIRARI, NS
Issue Date: 2004
Publisher: SPIE-INT SOC OPTICAL ENGINEERING
Citation: RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS III,5343,31-36
Abstract: Many promising applications of MEMS based devices are in critical systems. Hence, their reliability has become an important issue. The techniques used for the fabrication of these devices give rise to large residual stresses. This coupled with their high speeds of operation make them prone to fatigue failure. The focus of this work is the improvement of reliability under fatigue loading using multi-layers. This paper demonstrates that by adjusting the thickness ratios, the stress in a multi-layered resonator can be prevented from alternating. Moreover, the peak stress can be minimized and performance can be improved in harsh environments.
URI: http://dx.doi.org/10.1117/12.524442
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15282
http://hdl.handle.net/100/2003
ISBN: 0-8194-5251-3
ISSN: 0277-786X
Appears in Collections:Proceedings papers

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