Effect of torsion arm dimensions on natural frequency of a torsion mirror

Abstract

Micron-size torsion-mirrors, made in silicon, have been proposed and used in several optical communication applications. A very common structure used for torsion mirror, a framed diaphragm pivoted on two torsion wires, is analyzed for their frequency response as a function parameters of torsion wires, the silicon diaphragm and frame. The aim of the simulations is to obtain as high a natural frequency of vibration while maintaining a stiff frame around the diaphragm mirror. A set of optimum values of parameters could be determined for a given frequency of vibration.