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Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/100/1899

Title: Effect of torsion arm dimensions on natural frequency of a torsion mirror
Authors: CHANDORKAR, SA
APTE, PR
Issue Date: 2002
Publisher: SPIE-INT SOC OPTICAL ENGINEERING
Citation: PROCEEDINGS OF THE ELEVENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOL 1 & 2,4746,530-533
Abstract: Micron-size torsion-mirrors, made in silicon, have been proposed and used in several optical communication applications. A very common structure used for torsion mirror, a framed diaphragm pivoted on two torsion wires, is analyzed for their frequency response as a function parameters of torsion wires, the silicon diaphragm and frame. The aim of the simulations is to obtain as high a natural frequency of vibration while maintaining a stiff frame around the diaphragm mirror. A set of optimum values of parameters could be determined for a given frequency of vibration.
URI: http://dspace.library.iitb.ac.in/xmlui/handle/10054/15248
http://hdl.handle.net/100/1899
ISBN: 0-8194-4500-2
ISSN: 0277-786X
Appears in Collections:Proceedings papers

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