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|Title:||Effect of torsion arm dimensions on natural frequency of a torsion mirror|
|Publisher:||SPIE-INT SOC OPTICAL ENGINEERING|
|Citation:||PROCEEDINGS OF THE ELEVENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOL 1 & 2,4746,530-533|
|Abstract:||Micron-size torsion-mirrors, made in silicon, have been proposed and used in several optical communication applications. A very common structure used for torsion mirror, a framed diaphragm pivoted on two torsion wires, is analyzed for their frequency response as a function parameters of torsion wires, the silicon diaphragm and frame. The aim of the simulations is to obtain as high a natural frequency of vibration while maintaining a stiff frame around the diaphragm mirror. A set of optimum values of parameters could be determined for a given frequency of vibration.|
|Appears in Collections:||Proceedings papers|
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