DSpace
 

DSpace at IIT Bombay >
IITB Publications >
Proceedings papers >

Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/100/1786

Title: DC electrical conductivity of chemical vapour deposited diamond sheets: a correlation with hydrogen content and paramagnetic defects
Authors: SIKDER, AK
JACOB, AP
SHARDA, T
MISRA, DS
PANDEY, M
KABIRAJ, D
AVASTHI, DK
Keywords: polycrystalline diamond
thin-films
resonance
cvd
resistivity
silicon
methane
flame
Issue Date: 1998
Publisher: ELSEVIER SCIENCE SA
Citation: THIN SOLID FILMS,332,98-102
Abstract: Diamond sheets were grown on p-type Si(100) substrates varying the deposition pressure from 20 to 140 Torr at 1163 K by a hot filament chemical vapour deposition (HFCVD) process. A mixture of 0.8% methane in balance hydrogen was used as a precursor gas. Diamond sheets deposited at low pressures are translucent with very low concentration of hydrogen and non-diamond impurities, The amount of non-diamond impurities and the hydrogen content increase in the sheets significantly with the growth pressure. A systematic variation in the value of the room temperature DC electrical conductivity (sigma(300)) of diamond sheets was observed. Highly pure sheets show very high values of sigma(300). It is suggested that the paramagnetic defects intrinsic to CVD diamond might be one of the controlling parameters of sigma(300) Of the sheets. (C) 1998 Elsevier Science S.A. All rights reserved.
URI: http://dx.doi.org/10.1016/S0040-6090(98)01205-X
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15032
http://hdl.handle.net/100/1786
ISSN: 0040-6090
Appears in Collections:Proceedings papers

Files in This Item:

There are no files associated with this item.

View Statistics

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

 

Valid XHTML 1.0! DSpace Software Copyright © 2002-2010  Duraspace - Feedback