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|Title: ||Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer|
|Authors: ||PRASHANTHI, K|
|Issue Date: ||2012|
|Publisher: ||WILEY-V C H VERLAG GMBH|
|Citation: ||PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 6(2)77-79|
|Abstract: ||Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nano-electromechanicalsystems (NEMS) in both sensing and energy harvesting applications. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim|
|Appears in Collections:||Article|
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