Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si

Please use this identifier to cite or link to this item: http://dspace.library.iitb.ac.in/jspui/handle/100/14186

Title:	Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si
Authors:	PRASHANTHI, K MANDAL, M DUTTAGUPTA, SP PINTO, R PALKAR, VR
Keywords:	PIEZOELECTRIC THIN-FILMS PZT FILMS INTEGRATION CONSTANTS ACTUATOR DEVICES
Issue Date:	2011
Publisher:	ELSEVIER SCIENCE SA
Citation:	SENSORS AND ACTUATORS A-PHYSICAL,166(1)83-87
Abstract:	In this paper, the fabrication and characterization of a novel magnetoelectric multiferroic (Dy modified BiFeO(3) or BDFO) MEMS cantilevers fabricated directly on Si have been reported for the first time ever. The functioning of BDFO microcantilevers has been tested in the presence of electric field as well as magnetic field. The transverse piezoelectric coefficients d(31) and e(31) of the BDFO films measured from the deflection of the cantilever under applied voltage were -40 pm/V and -5.63 C/m(2) respectively. The piezoelectric properties of BDFO films are similar to that reported for lead zirconate titanate (PZT), while offering additional flexibility in designing and operating MEMS devices. (C) 2010 Elsevier B.V. All rights reserved.
URI:	http://dx.doi.org/10.1016/j.sna.2010.12.013 http://dspace.library.iitb.ac.in/jspui/handle/100/14186
ISSN:	0924-4247
Appears in Collections:	Article

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