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|Title:||Development of Crystallographic Texture and In-Grain Misorientation in CVD-Produced Single and Polycrystalline Diamond|
Rate Homoepitaxial Growth
Microwave Plasma Cvd
|Citation:||CHEMICAL VAPOR DEPOSITION,17(4-6)107-113|
|Abstract:||Extensive bulk and micro-texture measurements are used to characterize single and polycrystalline diamond thin films of different film thicknesses produced using CVD. With increasing film thickness, texturing improves and in-grain misorientation drops. This is observed for both single and polycrystalline films. Improved texturing in polycrystalline diamond can be rationalized from growth selection/advantage, however explanation(s) on the in-grain misorientation development and its relationship with texturing, if any, remain pending.|
|Appears in Collections:||Article|
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