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Browsing by Author WAGHMARE, PC

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Issue DateTitleAuthor(s)
2002Improvement in gate dielectric quality of ultra thin a : SiN : H MNS capacitor by hydrogen etching of the substrateWAGHMARE, PC; PATIL, SB; DUSANE, RO; RAO, VR
2002Reliability issues of ultra thin silicon nitride (a-SiN : H) by hot wire CVD for deep sub-micron CMOS technologiesWAGHMARE, PC; PATIL, SB; KUMBHAR, A; DUSANE, RO; RAO, VR
2002Ultra-thin silicon nitride by hot wire chemical vapor deposition (HWCVD) for deep sub-micron CMOS technologiesWAGHMARE, PC; PATIL, SB; KUMBHAR, A; DUSANE, RO; RAO, VR
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