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Browsing by Author SINGH, SUNIL KUMAR

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Issue DateTitleAuthor(s)
2006Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatmentKUMBHAR, ALKA A; SINGH, SUNIL KUMAR; DUSANE, RO
2006Repairing plasma-damaged low-k HSQ films with trimethylchlorosilane treatmentSINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO
2006Resisting oxygen plasma damage in low-k hydrogen silsesquioxane films by hydrogen plasma treatmentSINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO
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