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DSpace at IIT Bombay >
Browsing by Author KUMBHAR, ALKA A
Showing results 1 to 8 of 8
| Issue Date | Title | Author(s) | | 2006 | Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatment | KUMBHAR, ALKA A; SINGH, SUNIL KUMAR; DUSANE, RO |
| 2003 | Highly conducting doped poly-Si deposited by hot wire CVD and its applicability as gate material for CMOS devices | PATIL, SAMADHAN B; VAIRAGAR, ANAND V; KUMBHAR, ALKA A; SAHU, LAXMI; RAMGOPAL RAO, V; VENKATRAMANI, N; DUSANE, RO; SCHROEDER, B |
| 2003 | Nitrogen dilution effects on structural and electrical properties of hot-wire-deposited a-SiN:H films for deep-sub-micron CMOS technologies | WAGHMARE, PARAG C; PATIL, SAMADHAN B; KUMBHAR, ALKA A; RAMGOPAL RAO, V; DUSANE, RO |
| 2001 | Photoluminescent, wide-bandgap a-SiC:H alloy films deposited by Cat- CVD using acetylene | KUMBHAR, ALKA A; PATIL, SAMADHAN B; KUMAR, SANJAY; LAL, RAKESH; DUSANE, RO |
| 2003 | Preliminary results on a-SiC:H based thin film light emitting diode by hot wire CVD | PATIL, SAMADHAN B; KUMBHAR, ALKA A; SARASWAT, SHWETA; DUSANE, RO |
| 2006 | Repairing plasma-damaged low-k HSQ films with trimethylchlorosilane treatment | SINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO |
| 2006 | Resisting oxygen plasma damage in low-k hydrogen silsesquioxane films by hydrogen plasma treatment | SINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO |
| 2003 | Revisiting the B-factor variation in a-SiC:H deposited by HWCVD | SWAIN, BIBHU P; PATIL, SAMADHAN B; KUMBHAR, ALKA A; DUSANE, RO |
Showing results 1 to 8 of 8
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