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Browsing by Author KUMBHAR, ALKA A

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Showing results 1 to 8 of 8
Issue DateTitleAuthor(s)
2006Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatmentKUMBHAR, ALKA A; SINGH, SUNIL KUMAR; DUSANE, RO
2003Highly conducting doped poly-Si deposited by hot wire CVD and its applicability as gate material for CMOS devicesPATIL, SAMADHAN B; VAIRAGAR, ANAND V; KUMBHAR, ALKA A; SAHU, LAXMI; RAMGOPAL RAO, V; VENKATRAMANI, N; DUSANE, RO; SCHROEDER, B
2003Nitrogen dilution effects on structural and electrical properties of hot-wire-deposited a-SiN:H films for deep-sub-micron CMOS technologiesWAGHMARE, PARAG C; PATIL, SAMADHAN B; KUMBHAR, ALKA A; RAMGOPAL RAO, V; DUSANE, RO
2001Photoluminescent, wide-bandgap a-SiC:H alloy films deposited by Cat- CVD using acetyleneKUMBHAR, ALKA A; PATIL, SAMADHAN B; KUMAR, SANJAY; LAL, RAKESH; DUSANE, RO
2003Preliminary results on a-SiC:H based thin film light emitting diode by hot wire CVDPATIL, SAMADHAN B; KUMBHAR, ALKA A; SARASWAT, SHWETA; DUSANE, RO
2006Repairing plasma-damaged low-k HSQ films with trimethylchlorosilane treatmentSINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO
2006Resisting oxygen plasma damage in low-k hydrogen silsesquioxane films by hydrogen plasma treatmentSINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO
2003Revisiting the B-factor variation in a-SiC:H deposited by HWCVDSWAIN, BIBHU P; PATIL, SAMADHAN B; KUMBHAR, ALKA A; DUSANE, RO
Showing results 1 to 8 of 8

 

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