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DSpace at IIT Bombay >
Browsing by Author KUMBHAR, AA
Showing results 1 to 7 of 7
| Issue Date | Title | Author(s) | | 2008 | Aluminum-induced in situ crystallization of HWCVD a-Si : H films | GUPTA, S; CHELAWAT, H; KUMBHAR, AA; ADHIKARI, S; DUSANE, RO |
| 2006 | Further insights into the mechanism of hydrogen-plasma surface passivation of low-dielectric constant hydrogen silsesquioxane (HSQ) | SINGH, SK; KUMBHAR, AA; DUSANE, RO; BOCK, W |
| 2002 | Gas phase chemistry study during deposition of a-Si : H and mu c-Si : H films by HWCVD using quadrupole mass spectrometry | PATIL, SB; KUMBHAR, AA; DUSANE, RO |
| 2006 | Hot-wire chemical-vapor-deposited nanometer range a-SiC : H diffusion barrier films for ultralarge-scale-integrated application | SINGH, SK; KUMBHAR, AA; DUSANE, RO; BOCK, W |
| 2008 | Maintaining Cu metal integrity on low-k IMDs with a nanometer thick a-SiC : H film obtained by HWCVD | SINGH, SK; KUMBHAR, AA; DUSANE, RO |
| 1998 | Micro-crystalline phase formation in hot wire deposited Si : C : H alloy films from pure methane and silane mixtures | KUMBHAR, AA; DUSANE, RO; BAUER, S; SCHRODER, B |
| 2006 | Potential of Cat-CVD deposited a-SiC : H as diffusion barrier layer on low-k HSQ films for ULSI | SINGH, SK; KUMBHAR, AA; KOTHARI, M; DUSANE, RO |
Showing results 1 to 7 of 7
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