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Browsing by Author KUMBHAR, AA

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Showing results 1 to 7 of 7
Issue DateTitleAuthor(s)
2008Aluminum-induced in situ crystallization of HWCVD a-Si : H filmsGUPTA, S; CHELAWAT, H; KUMBHAR, AA; ADHIKARI, S; DUSANE, RO
2006Further insights into the mechanism of hydrogen-plasma surface passivation of low-dielectric constant hydrogen silsesquioxane (HSQ)SINGH, SK; KUMBHAR, AA; DUSANE, RO; BOCK, W
2002Gas phase chemistry study during deposition of a-Si : H and mu c-Si : H films by HWCVD using quadrupole mass spectrometryPATIL, SB; KUMBHAR, AA; DUSANE, RO
2006Hot-wire chemical-vapor-deposited nanometer range a-SiC : H diffusion barrier films for ultralarge-scale-integrated applicationSINGH, SK; KUMBHAR, AA; DUSANE, RO; BOCK, W
2008Maintaining Cu metal integrity on low-k IMDs with a nanometer thick a-SiC : H film obtained by HWCVDSINGH, SK; KUMBHAR, AA; DUSANE, RO
1998Micro-crystalline phase formation in hot wire deposited Si : C : H alloy films from pure methane and silane mixturesKUMBHAR, AA; DUSANE, RO; BAUER, S; SCHRODER, B
2006Potential of Cat-CVD deposited a-SiC : H as diffusion barrier layer on low-k HSQ films for ULSISINGH, SK; KUMBHAR, AA; KOTHARI, M; DUSANE, RO
Showing results 1 to 7 of 7

 

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