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Browsing by Author KUMBHAR, A

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Issue DateTitleAuthor(s)
2000Low temperature hot-wire CVD nitrides for deep sub-micron CMOS technologiesPATIL, SB; VAIDYA, S; KUMBHAR, A; DUSANE, RO; CHANDORKAR, AN; RAO, VR
2001Low temperature silicon nitride deposited by Cat-CVD for deep submicron metal-oxide-semiconductor devicesPATIL, SB; KUMBHAR, A; WAGHMARE, P; RAO, VR; DUSANE, RO
2002Reliability issues of ultra thin silicon nitride (a-SiN : H) by hot wire CVD for deep sub-micron CMOS technologiesWAGHMARE, PC; PATIL, SB; KUMBHAR, A; DUSANE, RO; RAO, VR
2002Ultra-thin silicon nitride by hot wire chemical vapor deposition (HWCVD) for deep sub-micron CMOS technologiesWAGHMARE, PC; PATIL, SB; KUMBHAR, A; DUSANE, RO; RAO, VR
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