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Browsing by Author CHOKSI, AJ

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Issue DateTitleAuthor(s)
1991ELECTRICAL-PROPERTIES OF SILICON DIOXIDE FILMS GROWN BY INDUCTIVELY COUPLED RF PLASMA ANODIZATIONCHOKSI, AJ; LAL, R; CHANDORKAR, AN
1992GROWTH-KINETICS OF SILICON DIOXIDE ON SILICON IN AN INDUCTIVELY COUPLED RF PLASMA AT CONSTANT ANODIZATION CURRENTSCHOKSI, AJ; LAL, R; CHANDORKAR, AN
1992Improved electrical-properties of Silicon dioxide films for MOS gate dielectrics grown in an inductively coupled RF plasmaCHOKSI, AJ; LAL, R; CHANDORKAR, AN
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