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DSpace at IIT Bombay >
Browsing by Author KUMBHAR, A
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) | | 2000 | Low temperature hot-wire CVD nitrides for deep sub-micron CMOS technologies | PATIL, SB; VAIDYA, S; KUMBHAR, A; DUSANE, RO; CHANDORKAR, AN; RAO, VR |
| 2001 | Low temperature silicon nitride deposited by Cat-CVD for deep submicron metal-oxide-semiconductor devices | PATIL, SB; KUMBHAR, A; WAGHMARE, P; RAO, VR; DUSANE, RO |
| 2002 | Reliability issues of ultra thin silicon nitride (a-SiN : H) by hot wire CVD for deep sub-micron CMOS technologies | WAGHMARE, PC; PATIL, SB; KUMBHAR, A; DUSANE, RO; RAO, VR |
| 2002 | Ultra-thin silicon nitride by hot wire chemical vapor deposition (HWCVD) for deep sub-micron CMOS technologies | WAGHMARE, PC; PATIL, SB; KUMBHAR, A; DUSANE, RO; RAO, VR |
Showing results 1 to 4 of 4
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