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DSpace at IIT Bombay >
Browsing by Author DUSANE, RO
Showing results 21 to 40 of 48
| Issue Date | Title | Author(s) | | 2001 | Influence of atomic hydrogen on the growth kinetics of a-Si : H films and on the properties of silicon substrates | SEITZ, H; BAUER, S; DUSANE, RO; SCHRODER, B |
| 2006 | Internal stress in Cat-CVD microcrystalline Si:H thin films | SAHU, LAXMI; KALE, NITIN; KULKARNI, NILESH; PINTO, R; DUSANE, RO; SCHRÖDER, B |
| 2001 | Is the nucleation and coalescence behavior in the growth of a-Si:H films prepared by the CAT-CVD different? | DUSANE, RO; BAUER, S; SCHROEDER, B; OECHSNER, H |
| 2000 | Low temperature hot-wire CVD nitrides for deep sub-micron CMOS technologies | PATIL, SB; VAIDYA, S; KUMBHAR, A; DUSANE, RO; CHANDORKAR, AN; RAO, VR |
| 2001 | Low temperature silicon nitride deposited by Cat-CVD for deep submicron metal-oxide-semiconductor devices | PATIL, SB; KUMBHAR, A; WAGHMARE, P; RAO, VR; DUSANE, RO |
| 2008 | Maintaining Cu metal integrity on low-k IMDs with a nanometer thick a-SiC : H film obtained by HWCVD | SINGH, SK; KUMBHAR, AA; DUSANE, RO |
| 1998 | Micro-crystalline phase formation in hot wire deposited Si : C : H alloy films from pure methane and silane mixtures | KUMBHAR, AA; DUSANE, RO; BAUER, S; SCHRODER, B |
| 2006 | Microcrystalline single and double junction silicon based solar cells entirely prepared by HWCVD on textured zinc oxide substrate | KUMAR, P; KUPICH, M; BOCK, W; DUSANE, RO; SCHROEDER, B |
| 2006 | Microscopic properties of H-2 diluted HWCVD deposited a-SiC : H film | SWAIN, BP; DUSANE, RO |
| 2006 | Multiphase structure of hydrogen diluted a-SiC : H deposited by HWCVD | SWAIN, BP; DUSANE, RO |
| 2003 | Nitrogen dilution effects on structural and electrical properties of hot-wire-deposited a-SiN:H films for deep-sub-micron CMOS technologies | WAGHMARE, PARAG C; PATIL, SAMADHAN B; KUMBHAR, ALKA A; RAMGOPAL RAO, V; DUSANE, RO |
| 2006 | Non-plasma-based technologies to augment backend processing in future ULSI | DUSANE, RO |
| 2006 | One-dimensional simulation study of microcrystalline silicon thin films for solar cell and thin film transistor applications using AMPS-1D | TRIPATHI,S; VENKATARAMANI, N; DUSANE, RO; SCHROEDER, B |
| 2001 | Photoluminescent, wide-bandgap a-SiC:H alloy films deposited by Cat- CVD using acetylene | KUMBHAR, ALKA A; PATIL, SAMADHAN B; KUMAR, SANJAY; LAL, RAKESH; DUSANE, RO |
| 1996 | p-i interface engineering and i-layer control of hot-wire a-Si:H based p-i-n solar cells using in-situ ellipsometry | BAUER, S; DUSANE, RO; HERBST, W; DIEHL, F; SCHRODER, B |
| 2006 | Potential of Cat-CVD deposited a-SiC : H as diffusion barrier layer on low-k HSQ films for ULSI | SINGH, SK; KUMBHAR, AA; KOTHARI, M; DUSANE, RO |
| 2003 | Preliminary results on a-SiC:H based thin film light emitting diode by hot wire CVD | PATIL, SAMADHAN B; KUMBHAR, ALKA A; SARASWAT, SHWETA; DUSANE, RO |
| 2002 | Reliability issues of ultra thin silicon nitride (a-SiN : H) by hot wire CVD for deep sub-micron CMOS technologies | WAGHMARE, PC; PATIL, SB; KUMBHAR, A; DUSANE, RO; RAO, VR |
| 2006 | Repairing plasma-damaged low-k HSQ films with trimethylchlorosilane treatment | SINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO |
| 2006 | Resisting oxygen plasma damage in low-k hydrogen silsesquioxane films by hydrogen plasma treatment | SINGH, SUNIL KUMAR; KUMBHAR, ALKA A; DUSANE, RO |
Showing results 21 to 40 of 48
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