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Issue Date	Title	Author(s)
2003	Nitrogen dilution effects on structural and electrical properties of hot-wire-deposited a-SiN:H films for deep-sub-micron CMOS technologies	WAGHMARE, PARAG C; PATIL, SAMADHAN B; KUMBHAR, ALKA A; RAMGOPAL RAO, V; DUSANE, RO
2002	Suppression of boron penetration by hot wire CVD polysilicon	VAIRAGAR, AV; PATIL, SAMADHAN B; PETE, DJ; WAGHMARE, PARAG C; DUSANE, RO; VENKATRAMANI, N; RAMGOPAL RAO, V

Showing results 1 to 2 of 2